Gaussian process modeling for engineered surfaces with applications to Si wafer production (bibtex)
Bibtex Entry:
@article{plumlee2013gaussian,
  title={Gaussian process modeling for engineered surfaces with applications to {S}i wafer production},
  author={Plumlee, Matthew and Jin, Ran and Roshan Joseph, V and Shi, Jianjun},
  journal={Stat},
  volume={2},
  number={1},
  pages={159--170},
  year={2013}
}